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Cambridge sf6 n2 control in Gabon

Cambridge sf6 n2 control in Gabon

24/07/2019For sulfur doping, we irradiate silicon in SF6 gas; for selenium and tellurium, we evaporate a film onto the silicon and irradiate in N2 gas; lastly, as a control, we irradiated untreated silicon in N2 gas. Our analysis shows that the deactivation of infrared absorption after thermal annealing is likely caused by dopant diffusion.

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